RBS-channeling spectrometry - enables us to investigate crystalline materials. RBS channeling is based on channeling of charged particles in monocrystalline grid of sample. Path of ions that browse through crystals is reduced by crystalline grid. Most of incident ions is caught inside the channels from atoms string. These atoms are further dispersed inside channels on great angle. For RBS channeling are typical ion beams with 1-2MeV He+ ions that are suitable for good mass and depth resolution and small radiation damage.
The signal of the impurity and host lattice in RBS spectra is separated by scattering kinematics . The angular yield curve (scan) is obtained by monitoring the yield of the impurity and host lattice along the channeling axis using ion beam impact angle changing. From the angular yield curves of the axial channels in virgin material we obtain the impurity position in the measured cut. In order to determine the lattice position of impurities several relevant crystallographic directions have been selected.